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Enabling technologies for MEMS and nanodevices : advanced micro and nanosystems / edited by Henry Baltes ... [et al.].

Contributor(s): Material type: TextTextPublication details: Weinheim [Germany] : Wiley, 2013.Edition: 2nd edDescription: xii, 427 p. : ill. ; 23 cmContent type:
  • text
Media type:
  • unmediated
Carrier type:
  • volume
ISBN:
  • 9783527334988
Subject(s): DDC classification:
  • 21 621.381 B.H. E 2013
Summary: This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon processing.
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Item type Current library Call number Status Date due Barcode
Books Books Main Library Main Stacks 621.381 B.H. E 2013 (Browse shelf(Opens below)) Available 00016920

Includes index.

This edition of 'CMOS-MEMS' was originally published in the successful series 'Advanced Micro & Nanosystems'. A close look at enabling technologies is taken, the first section on MEMS featuring an introduction to the challenges and benefi ts of three-dimensional silicon processing.

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