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The science and engineering of microelectronic fabrication / Stephen A. Campbell.

By: Campbell, Stephen A, 1954-.
Material type: TextTextSeries: The Oxford series in electrical and computer engineering.Publisher: New York : Oxford University Press, 2001Edition: 2nd ed.Description: xiv, 603 p. : ill. ; 24 cm.ISBN: 0195136055.Subject(s): Semiconductors -- Design and constructionDDC classification: 621.38152 Online resources: Publisher description | Table of contents only
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621.38152 C.S. S 2001 (Browse shelf) Available 00012320

Includes bibliographical references and index.

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